Weimer, D.; Huferath-von Luepke, S.; Tausendfreund, A.; Bergmann, R. B.; Goch, G.; Scholz-Reiter, B.
Dimensional In Situ Shape and Surface Inspection of Metallic Micro Components in Micro Bulk Manufacturing
In: Advanced Materials Research, 1018(2014), Trans Tech Publications, Zürich, pp. 493-500
(Workgroup:
BIBA)
